Woollam VASE IR/UV ellipsometry spline-combine function

バージョン 1.1.0 (9.8 KB) 作成者: Jona Grümbel
This function combines ellipsometry datasets from IR/UV spectral range recorded by Woollam VASE32, yielding more reliable pbp fit results.
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更新 2024/1/26

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This function enables combined IR/UV spectral range ellipsometry datasets for enhanced boundary conditions of the numerical point by point(pbp) fit provided by the Woollam VASE32 ellipsometry software. It uses the splinefit.m function by Jonas Lundgren (https://de.mathworks.com/matlabcentral/fileexchange/71225-splinefit), so one can set equidistant energy stepsize over the whole spectral range which is required by VASE32 for numerical pbp fitting. Note, that the code is compatible only with .dat files from VASE32, which is the output format as well. For usage with different ellipsometry software one has to implement major revisions.
The code includes e.g. options to (self-consistently) correct experimental Psi and Delta data and set user defined splinefit parameters, as well as proper description of phase shifts('poles') in Psi and Delta. For Details, see ReadMe block at the main function code.

引用

Jona Grümbel (2024). Woollam VASE IR/UV ellipsometry spline-combine function (https://www.mathworks.com/matlabcentral/fileexchange/154732-woollam-vase-ir-uv-ellipsometry-spline-combine-function), MATLAB Central File Exchange. 取得済み .

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作成: R2023b
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ヒントを得たファイル: SPLINEFIT

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バージョン 公開済み リリース ノート
1.1.0

- 4 different modes for correction of Psi and Delta data, including self-consistent correction so that the pseudo DF is not distorted by the correction.
- minor bug fixes

1.0.1

minor bug fixes

1.0.0